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HomeMaterials Science ForumMaterials Science Forum Vols. 325-326A Multi-Technique Study of Titanium Nitride Films...

A Multi-Technique Study of Titanium Nitride Films Deposited via Reactive Sputter Deposition

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Periodical:

Materials Science Forum (Volumes 325-326)

Pages:

131-140

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.325-326.131

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Online since:

January 2000

Authors:

C.G.H. Walker, S.A. Morton, J.M. Charnock, E.J. MacLean, Norman M.D. Brown

Keywords:

Auger Parameter, CaF₂, Disorder, EXAFS, XANES, X-Ray Diffraction (XRD), X-Ray Photoelectron Spectroscopy (XPS)

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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