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HomeMaterials Science ForumMaterials Science Forum Vols. 343-346Synthesis of Si Nanoparticles within Buried Layers...

Synthesis of Si Nanoparticles within Buried Layers of SiO_x

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Metastable, Mechanically Alloyed and Nanocrystalline Materials 1999

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Periodical:

Materials Science Forum (Volumes 343-346)

Pages:

488-493

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.343-346.488

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Online since:

May 2000

Authors:

Uwe Kahler, Herbert Hofmeister

Keywords:

Annealing, Buried Oxide, Decomposition, Evaporation, Infrared Spectroscopy, Nanoparticle, Photoluminescence (PL), Quantum Dot (QD), Silicon, SiO₂, SiO_x, Wafer Bonding

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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