Structural Development in Hard Si-Based TiN Coatings as a Function of Temperature: A Comprehensive Study in Vacuum and in Air

Abstract:

Article Preview

Info:

Periodical:

Edited by:

M.J. Pomeroy, S. Hampshire, M.A. Centeno, J.A. Odriozola and Y. Laurent

Pages:

151-160

Citation:

F. Vaz et al., "Structural Development in Hard Si-Based TiN Coatings as a Function of Temperature: A Comprehensive Study in Vacuum and in Air", Materials Science Forum, Vol. 383, pp. 151-160, 2002

Online since:

December 2001

Export:

Price:

$38.00

Fetching data from Crossref.
This may take some time to load.