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HomeMaterials Science ForumMaterials Science Forum Vol. 383Structural Development in Hard Si-Based TiN...

Structural Development in Hard Si-Based TiN Coatings as a Function of Temperature: A Comprehensive Study in Vacuum and in Air

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Periodical:

Materials Science Forum (Volume 383)

Pages:

151-160

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.383.151

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Online since:

December 2001

Authors:

F. Vaz, L. Rebouta, Sandra Carvalho, L.A. Rocha, Delfim Soares, Eduardo Alves

Keywords:

Microstructure, Oxidation Resistance, Thermal Stability, Titanium Nitride

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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