Structural Development in Hard Si-Based TiN Coatings as a Function of Temperature: A Comprehensive Study in Vacuum and in Air

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Periodical:

Edited by:

M.J. Pomeroy, S. Hampshire, M.A. Centeno, J.A. Odriozola and Y. Laurent

Pages:

151-160

DOI:

10.4028/www.scientific.net/MSF.383.151

Citation:

F. Vaz et al., "Structural Development in Hard Si-Based TiN Coatings as a Function of Temperature: A Comprehensive Study in Vacuum and in Air", Materials Science Forum, Vol. 383, pp. 151-160, 2002

Online since:

December 2001

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$35.00

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