Dynamic Characteristics of Diaphragm Microactuators Utilizing Sputter-Deposited TiNi Shape-Memory Alloy Thin Films

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Periodical:

Materials Science Forum (Volumes 394-395)

Edited by:

Y.Y. Chu and L.C. Zhao

Pages:

467-474

Citation:

S. Miyazaki et al., "Dynamic Characteristics of Diaphragm Microactuators Utilizing Sputter-Deposited TiNi Shape-Memory Alloy Thin Films", Materials Science Forum, Vols. 394-395, pp. 467-474, 2002

Online since:

May 2002

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$38.00

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