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HomeMaterials Science ForumMaterials Science Forum Vols. 394-395Dynamic Characteristics of Diaphragm...

Dynamic Characteristics of Diaphragm Microactuators Utilizing Sputter-Deposited TiNi Shape-Memory Alloy Thin Films

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Shape Memory Materials and their Applications

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Periodical:

Materials Science Forum (Volumes 394-395)

Pages:

467-474

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.394-395.467

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Online since:

May 2002

Authors:

Shuichi Miyazaki, M. Hirano, V.H. No

Keywords:

Dynamic Characteristic, Martensitic Transformation (MT), Microactuator, Thin Film, TiNi Shape Memory Alloy

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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