Bimorph-Type Microactuator using TiNi Shape-Memory Thin Film

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Periodical:

Materials Science Forum (Volumes 394-395)

Edited by:

Y.Y. Chu and L.C. Zhao

Pages:

487-490

Citation:

A. Ishida et al., "Bimorph-Type Microactuator using TiNi Shape-Memory Thin Film", Materials Science Forum, Vols. 394-395, pp. 487-490, 2002

Online since:

May 2002

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