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HomeMaterials Science ForumMaterials Science Forum Vols. 426-432On Production of Nanocrystalline Ternary Nitride...

On Production of Nanocrystalline Ternary Nitride Coatings via Magnetron Sputtering

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THERMEC'2003

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Periodical:

Materials Science Forum (Volumes 426-432)

Pages:

2473-2478

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.426-432.2473

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Online since:

August 2003

Authors:

Richard Wuhrer, G. McCredie, Wing Yiu Yeung

Keywords:

Deposition Bias Voltage, Magnetron Sputtering, Nanocrystalline Coating

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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