On Production of Nanocrystalline Ternary Nitride Coatings via Magnetron Sputtering

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Periodical:

Materials Science Forum (Volumes 426-432)

Main Theme:

Edited by:

T. Candra, Jose Maria Torralba and T. Sakai

Pages:

2473-2478

DOI:

10.4028/www.scientific.net/MSF.426-432.2473

Citation:

R. Wuhrer et al., "On Production of Nanocrystalline Ternary Nitride Coatings via Magnetron Sputtering", Materials Science Forum, Vols. 426-432, pp. 2473-2478, 2003

Online since:

August 2003

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