Tailoring of the Elastic Properties by Texture Control in Ferroelectric Thin Films for MEMS

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Periodical:

Materials Science Forum (Volumes 426-432)

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Edited by:

T. Candra, Jose Maria Torralba and T. Sakai

Pages:

3433-3438

Citation:

J. Ricote et al., "Tailoring of the Elastic Properties by Texture Control in Ferroelectric Thin Films for MEMS", Materials Science Forum, Vols. 426-432, pp. 3433-3438, 2003

Online since:

August 2003

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