Study on Grown-in Defects in CZ-Si by Positron Annihilation

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Materials Science Forum (Volumes 445-446)

Edited by:

Toshio Hyodo, Yoshinori Kobayashi, Yasuyuki Nagashima, Haruo Saito

Pages:

159-161

Citation:

S. Nakagawa et al., "Study on Grown-in Defects in CZ-Si by Positron Annihilation", Materials Science Forum, Vols. 445-446, pp. 159-161, 2004

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January 2004

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