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Positron Annihilation and Positronium Trapping in Zeolites
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Positron Lifetime Spectroscopy as a Tool for Studying Molecular Motions in n-p-Ethoxybenzylidene-p-Butylaniline
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Positronium as a Probe of Gas Permeability and Local Dynamics in Highly Plasticized State of Polymers
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Porosity in Silicon and Silica Thin Films Monitored by Positrons and Positronium
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The Effect of Wheat Hay on Carbon Black Loaded EPDM Composite Studied by Positron Annihilation Lifetime Spectroscopy
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Thermal Isomerization of Azo-Benzene in PMMA Probed by a Pulsed Low-Energy Positron Beam
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Positron Annihilation Lifetime Study of Helium Ions Implanted Polyethylene Blends
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Comparative Study of Porosity in Low-k SiOCH Thin Films Obtained at Different Deposition Conditions
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HomeMaterials Science ForumMaterials Science Forum Vols. 445-446Porosity in Silicon and Silica Thin Films...

Porosity in Silicon and Silica Thin Films Monitored by Positrons and Positronium

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Positron Annihilation - ICPA-13

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Periodical:

Materials Science Forum (Volumes 445-446)

Pages:

254-258

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.445-446.254

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Cite this paper

Online since:

January 2004

Authors:

A. van Veen, R. Escobar Galindo, S.W.H. Eijt, H. Schut, H. van Gog, A.R. Balkenende, F.K. De Theije

Keywords:

Cavities, Helium, Hydrogen, Low-k Dielectrics, Positron Annihilation, Silica, Silicon

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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