Porosity in Silicon and Silica Thin Films Monitored by Positrons and Positronium

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Periodical:

Materials Science Forum (Volumes 445-446)

Edited by:

Toshio Hyodo, Yoshinori Kobayashi, Yasuyuki Nagashima, Haruo Saito

Pages:

254-258

DOI:

10.4028/www.scientific.net/MSF.445-446.254

Citation:

A. van Veen et al., "Porosity in Silicon and Silica Thin Films Monitored by Positrons and Positronium", Materials Science Forum, Vols. 445-446, pp. 254-258, 2004

Online since:

January 2004

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$35.00

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