Positronium Annihilation Lifetime Spectroscopy of Porous Low-k Films with Periodic Pore Structures

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Periodical:

Materials Science Forum (Volumes 445-446)

Edited by:

Toshio Hyodo, Yoshinori Kobayashi, Yasuyuki Nagashima, Haruo Saito

Pages:

334-336

DOI:

10.4028/www.scientific.net/MSF.445-446.334

Citation:

T. Ohdaira et al., "Positronium Annihilation Lifetime Spectroscopy of Porous Low-k Films with Periodic Pore Structures", Materials Science Forum, Vols. 445-446, pp. 334-336, 2004

Online since:

January 2004

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$35.00

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