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HomeMaterials Science ForumMaterials Science Forum Vols. 445-446Positronium Annihilation Lifetime Spectroscopy of...

Positronium Annihilation Lifetime Spectroscopy of Porous Low-k Films with Periodic Pore Structures

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Periodical:

Materials Science Forum (Volumes 445-446)

Pages:

334-336

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.445-446.334

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Online since:

January 2004

Authors:

Toshiyuki Ohdaira, Ryoichi Suzuki, Hironobu Shirataki, Shin-Ya Matsuno

Keywords:

Low-K, MSQ, PALS, Porous, Positronium, Positrons

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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