The Effect of Various Parameters on the Structure of W-Ti Thin Films

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Periodical:

Materials Science Forum (Volumes 453-454)

Edited by:

Dragan P. Uskokovic, Slobodan K. Milonjic, Dejan I. Rakovic

Pages:

55-60

Citation:

S. Petrović et al., "The Effect of Various Parameters on the Structure of W-Ti Thin Films", Materials Science Forum, Vols. 453-454, pp. 55-60, 2004

Online since:

May 2004

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$38.00

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DOI: https://doi.org/10.1023/a:1008889009741

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