Paper Titles

Structure of Grain Boundary Phases in Silicon Nitride
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Atomic Structure of Interfaces in Silicon Nitride
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Thermo-Mechanical Properties of Silicon Nitride and Their Dependence on Microstructure
p.162

Microstructural Effect on Creep of Silicon Nitride Ceramics
p.204

Electrical Properties of Silicon Nitride
p.215

Silicon Nitride in Semiconductor Device Technology
p.228

Silicon Nitride-Based Composites
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Silicon Nitride Whisker Synthesis by Carbothermal Reduction of Silica
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Evolution of Applications of Si₃N₄-Based Materials
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HomeMaterials Science ForumMaterials Science Forum Vol. 47Electrical Properties of Silicon Nitride

Electrical Properties of Silicon Nitride

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Preparation and Properties of Silicon Nitride Based Materials

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Periodical:

Materials Science Forum (Volume 47)

Pages:

215-227

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.47.215

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Online since:

January 1989

Authors:

H. Ohno, Y. Katano

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© 1989 Trans Tech Publications Ltd. All Rights Reserved

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