Silicon Nitride in Semiconductor Device Technology

Abstract:

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Periodical:

Edited by:

D.A. Bonnel and T. Y. Tien

Pages:

228-248

DOI:

10.4028/www.scientific.net/MSF.47.228

Citation:

M. Arienzo and W.A. Orr-Arienzo, "Silicon Nitride in Semiconductor Device Technology", Materials Science Forum, Vol. 47, pp. 228-248, 1989

Online since:

January 1991

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Price:

$35.00

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