In this study, the microstructure of two kinds of diamond-like carbon films was studied. These films were produced during the deposition of two kinds of hydrocarbon gas plasma by a newly developed technique called plasma based ion implantation (PBII). Microstructural analysis was performed by means of high resolution transmission electron microscopy (HRTEM). An amorphous DLC film was obtained by using C2H2 plasma. The crystal structure of carbon ( (C 168H ) was generated inside the DLC film when C5H6CH3 plasma was used. The effect of the precursor gases used in the present experiment on the microstructure of the DLC film was also studied.