Microstructural Observation of Diamond Like Carbon Film Prepared from C2H2 / C5H6CH3 Plasma Beam Source

Abstract:

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In this study, the microstructure of two kinds of diamond-like carbon films was studied. These films were produced during the deposition of two kinds of hydrocarbon gas plasma by a newly developed technique called plasma based ion implantation (PBII). Microstructural analysis was performed by means of high resolution transmission electron microscopy (HRTEM). An amorphous DLC film was obtained by using C2H2 plasma. The crystal structure of carbon ( (C 168H ) was generated inside the DLC film when C5H6CH3 plasma was used. The effect of the precursor gases used in the present experiment on the microstructure of the DLC film was also studied.

Info:

Periodical:

Materials Science Forum (Volumes 475-479)

Main Theme:

Edited by:

Z.Y. Zhong, H. Saka, T.H. Kim, E.A. Holm, Y.F. Han and X.S. Xie

Pages:

2905-2908

DOI:

10.4028/www.scientific.net/MSF.475-479.2905

Citation:

L. Liu et al., "Microstructural Observation of Diamond Like Carbon Film Prepared from C2H2 / C5H6CH3 Plasma Beam Source", Materials Science Forum, Vols. 475-479, pp. 2905-2908, 2005

Online since:

January 2005

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$35.00

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