Characteristics of SnOx-Coated Lithium Manganese Oxide Thin Film for MEMS Power System

Jae Ho Lee; Young Jae Kim; Hee Soo Moon; Jong Wan Park

doi:10.4028/www.scientific.net/MSF.486-487.562

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HomeMaterials Science ForumMaterials Science Forum Vols. 486-487Characteristics of SnOx-Coated Lithium Manganese...

Characteristics of SnO_x-Coated Lithium Manganese Oxide Thin Film for MEMS Power System

Abstract:

We prepared spinel-phase LiMn2O4 layer by using rf magnetron sputtering system. LiMn2O4 films were deposited at room temperature and then annealed at 750°C for crystallization to spinel type. In order to reduce the interface reaction such as Mn dissolution phenomenon during operation, we introduced SnOx (coating-layer) thin film. The SnOx films were deposited on LiMn2O4 films by rf magnetron sputtering system. A SnOx-coated LiMn2O4 film was more stable during the chargingdischarging reaction and maintained good cycle behavior at high temperature conditions of 55°C.

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Materials Science Forum (Volumes 486-487)

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562-565

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.486-487.562

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Online since:

June 2005

Authors:

Jae Ho Lee, Young Jae Kim, Hee Soo Moon, Jong Wan Park

Keywords:

LiMn₂O₄, Micro Battery, Micro-Electromechanical System (MEMS), SnO_x

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References

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[5] [10] [15] [20] [25] [30] [35] [40] [45] [50] [55] Cycle Number Non-coated spinel film SnOx-1 min coated spinel film SnOx-2 min coated spinel film SnOx-5 min coated spinel film.

DOI: 10.37473/dac/10.1007/s10854-022-08219-4

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[5] [10] [15] [20] [25] [30] [35] [40] [45] [50] [55] Cycle Number Non-coated spinel film SnOx-1 min coated spinel film SnOx-2 min coated spinel film SnOx-5 min coated spinel film Fig 4. Cyclic behaviors of the non-coated LiMn2O4 and SnOx 1min, 2min and 5min coated LiMn2O4 at (a) room temperature and (b) 55℃℃℃℃ high temperature. (b)(b)(b)(b) (a)(a)(a)(a).

DOI: 10.1021/acsami.9b09901.s003

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