Electrochemical Characteristics of Si/Mo Multilayer Anode for Microbattery in MEMS

Abstract:

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We have prepared the Si/Mo multilayer consisting of active/inactive material using rf/dc magnetron sputtering. The pre-treatment using an ECR plasma were introduced at current collector for the adhesion and removal of surface contamination. The structural and electrochemical characteristics of multilayers have been investigated. The multilayer nearly maintained more than 90 % of the initial capacity (2653 mAh/g) after 100 cycles whereas the Si thin film was gradually degraded after 40 cycles.

Info:

Periodical:

Materials Science Forum (Volumes 486-487)

Edited by:

Hyung Sun Kim, Sang-Yeop Park, Bo Young Hur and Soo Wohn Lee

Pages:

558-561

DOI:

10.4028/www.scientific.net/MSF.486-487.558

Citation:

J.-Y. Jung et al., "Electrochemical Characteristics of Si/Mo Multilayer Anode for Microbattery in MEMS", Materials Science Forum, Vols. 486-487, pp. 558-561, 2005

Online since:

June 2005

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Price:

$35.00

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