Electrochemical Characteristics of Si/Mo Multilayer Anode for Microbattery in MEMS

Ju-Young Jung; Myung Hoon Kim; Hee Soo Moon; Jong Wan Park

doi:10.4028/www.scientific.net/MSF.486-487.558

Paper Titles

Synthesis of Calcium Carbonate from Calcium Chlorine Solution Using Homogeneous Precipitation Method
p.542

Synthesis of Calcium Carbonate Particles Modified by Coating with Nickel Precursor
p.546

Influence of the Electromagnetic Stirring on Globularization of Primary Solid Phase in Solid-Liquid Region
p.550

Thermoelectric Properties of Co_1-xNb_xSb₃ Prepared by Induction Melting
p.554

Electrochemical Characteristics of Si/Mo Multilayer Anode for Microbattery in MEMS
p.558

Characteristics of SnO_x-Coated Lithium Manganese Oxide Thin Film for MEMS Power System
p.562

Characteristics of Polymer Composite Electrolyte for MEMS Power System
p.566

Effect of PVP Addition on Microstructure of SrZrO₃ Thin Films on Bi(2223) Tapes
p.570

Effect of Solvent Extraction on Removal of Heavy Metal Ions Using Lignocellulosic Fiber
p.574

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Electrochemical Characteristics of Si/Mo Multilayer Anode for Microbattery in MEMS

Abstract:

We have prepared the Si/Mo multilayer consisting of active/inactive material using rf/dc magnetron sputtering. The pre-treatment using an ECR plasma were introduced at current collector for the adhesion and removal of surface contamination. The structural and electrochemical characteristics of multilayers have been investigated. The multilayer nearly maintained more than 90 % of the initial capacity (2653 mAh/g) after 100 cycles whereas the Si thin film was gradually degraded after 40 cycles.