Microstructure and Texture in Free-Standing CVD Diamond Films

H.P. Feng; H.X. Zhu; Wei Min Mao; Leng Chen; Fan Xiu Lu

doi:10.4028/www.scientific.net/MSF.495-497.1365

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HomeMaterials Science ForumMaterials Science Forum Vols. 495-497Microstructure and Texture in Free-Standing CVD...

Microstructure and Texture in Free-Standing CVD Diamond Films

Abstract:

Free-standing CVD diamond films were prepared under the substrate temperature in the range of 850-1050oC. Macro- and micro-textures of the films were investigated based on the SEM observation as well as on the ODF and EBSD analysis. It was found that certain growth selection process appeared during diamond deposition which, however, did not lead to a strong film texture. It is indicated that strong fluctuation of growth ratio V<100>/V<111> and frequent growth twinning during film deposition resulted in randomization effect of grain orientations, which can be transformed by adjusting the parameters of film preparation.

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Materials Science Forum (Volumes 495-497)

Pages:

1365-1370

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.495-497.1365

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Online since:

September 2005

Authors:

H.P. Feng, H.X. Zhu, Wei Min Mao, Leng Chen, Fan Xiu Lu

Keywords:

Twinning, Chemical Vapor Deposition (CVD), Diamond Film, Electron Backscatter Diffraction (EBSD), Microstructure

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