Nano-Scale Stress Microscopy of Ceramic Materials Using Their Cathodoluminescence Emission
An overview is given of our recent research achievements in nano-scale stress microscopy based on cathodoluminescence (CL) piezo-spectroscopy (PS) studies of ceramics. The main underlying concepts of CL nano-scale microscopy are presented, with emphasis placed on the spatial resolution of the electron probe operating at low voltages in a field-emission gun scanning electron microscope (FEG-SEM). The stress assessment technique shown here proves its general validity independent of the physical mechanisms behind the CL emission. A table, including CL spectra from impurities, defects and electron-hole recombination, is given of the stress dependence of the wavelength of selected CL bands from various ceramics of industrial use, including a reliability assessment of these dependences. Finally, some applications of nano-scale stress microscopy are shown and brief comments are offered regarding possible future evolutions and impacts on the development of new materials and devices.
Masaaki Naka and Toshimi Yamane
G. Pezzotti "Nano-Scale Stress Microscopy of Ceramic Materials Using Their Cathodoluminescence Emission ", Materials Science Forum, Vol. 502, pp. 263-268, 2005