Vehicle Clustering Phenomenon in Automatic Materials Handling Systems in 300mm Semiconductor Manufacturing

Da Yin Liao

doi:10.4028/www.scientific.net/MSF.505-507.1129

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Vehicle Clustering Phenomenon in Automatic Materials Handling Systems in 300mm Semiconductor Manufacturing
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HomeMaterials Science ForumMaterials Science Forum Vols. 505-507Vehicle Clustering Phenomenon in Automatic...

Vehicle Clustering Phenomenon in Automatic Materials Handling Systems in 300mm Semiconductor Manufacturing

Abstract:

During design and implementation of the automatic materials handling system (AMHS) for a local 300mm semiconductor wafer fab (semiconductor fabrication plant), we observed and found an interesting phenomenon Vehicle Clustering Phenomenon (VCP) from the dynamics of automated vehicles: As time evolves, the distance between any two adjacent vehicles usually becomes very close enough as if all the vehicles are a long train of vehicles running around the loop. The overall performance thus deteriorates due to this phenomenon. This paper explores the causes of the VCP problem and clarifies its impacts to automatic materials handling operations in 300mm semiconductor manufacturing.

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Periodical:

Materials Science Forum (Volumes 505-507)

Pages:

1129-1134

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.505-507.1129

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Online since:

January 2006

Authors:

Da Yin Liao

Keywords:

300mm Semiconductor Manufacturing, Automatic Materials Handling System, Vehicle Clustering Phenomenon

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References

[1] Automated Material Handling System (AMHS) Framework User Requirements Document: Version 1. 0, International SEMATECH, (1999).

Google Scholar

[2] Bozer, Y. A. and Srinivasan, M. M., Tandem configurations for AGV systems offer simplicity and flexibility. Industrial Engineering, 21(2), 23 (1989).

Google Scholar

[3] Ting, J. -H. and Tanchoco, J. M. A., Unidirectional circular layout for overhead material handling systems. International Journal of Production Research, 38(16), 3913 (2000).

DOI: 10.1080/00207540050176085

Google Scholar

[4] Chen, H., Chu, C. and Proth, J. -M., Cyclic scheduling of a hoist with time window constraints. IEEE Transactions on Robotics and Automation, 14(1), 144 (1998).

DOI: 10.1109/70.660860

Google Scholar

[5] Kats, V., Levner, E. and Meyzin, L., Multiple-part cyclic hoist scheduling using a sieve method. IEEE Transactions on Robotics and Automation, 15(4), 704 (1999).

DOI: 10.1109/70.781993

Google Scholar

[6] Shapiro, G. W. and Nuttle, H. L. W., Hoist scheduling for a PCB electroplating facility. IIE Transactions, 20, 157 (1988).

DOI: 10.1080/07408178808966165

Google Scholar