Nanometrology – Nanopositioning- and Nanomeasuring Machine with Integrated Nanopobes

Gerd Jäger; T. Hausotte; E. Manske; H.-J. Büchner; R. Mastylo; N. Dorozhovets; R. Füßl; R. Grünwald

doi:10.4028/www.scientific.net/MSF.505-507.7

Paper Titles

Developing a Nanowriter System: Simulation and Experimental Set-Up of a Plasmonic-Based Lens Design
p.1

Nanometrology – Nanopositioning- and Nanomeasuring Machine with Integrated Nanopobes
p.7

Study of a Miniature Air Bearing Linear Stage System
p.13

Development of Micro Metal Forming Manufacturing System
p.19

Development of a Drop-On-Demand Micro Dispensing System
p.25

Mechanisms of Heat Transfer in Rotary Shaft of Rotating Machine with Nano-Sized Particles Lubricant
p.31

Fabrication and Mechanical Properties of Glass Fiber/Epoxy Nanocomposites
p.37

Determination of Residual Resist Layer Thickness in E-Beam Lithography Based on Energy Dispersive X-Ray Spectrometer
p.43

Development of Pressure Technique of Brake Nanofluids from an Arc Spray Nanoparticles Synthesis System
p.49

HomeMaterials Science ForumMaterials Science Forum Vols. 505-507Nanometrology – Nanopositioning- and Nanomeasuring...

Nanometrology – Nanopositioning- and Nanomeasuring Machine with Integrated Nanopobes

Abstract:

The paper describes the operation of a high-precision wide scale three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0,1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm. The NPM-Machine has been developed by the Technische Universität Ilmenau and manufactured by the SIOS Meßtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB). The integration of several, optical and tactile probe systems and scanning force microscopes makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and water inspection, circuit testing as well as measuring optical and mechanical precision work pieces such as micro lens arrays, concave lenses, mm-step height standards.

You might also be interested in these eBooks

Progress on Advanced Manufacture for Micro/Nano Technology 2005

View Preview

Info:

Periodical:

Materials Science Forum (Volumes 505-507)

Pages:

7-12

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.505-507.7

Citation:

Cite this paper

Online since:

January 2006

Authors:

Gerd Jäger, T. Hausotte, E. Manske, H.-J. Büchner, R. Mastylo, N. Dorozhovets, R. Füßl, R. Grünwald

Keywords:

Interferometer, Nano Metrology, Nanopositioning, Nanoprobe

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] G. Jäger, E. Manske, T. Hausotte, W. Schott: Operation and analysis of a nanopositioning and nanomeasuring machine, Proceedings of the 17th Annual Meeting of the ASPE, St. Louis, Missouri, USA, 2002, S. 299 - 304.

Google Scholar

[2] G. Jäger, E. Manske, T. Hausotte, H. Büchner, R. Grünwald, R. Füßl: Application of miniature interferometers to nanomeasuring and nanopositioning devices, Proceedings of the Conference Scanning Probe Microscopy, Sensors and Nanostructures (TEDA), Beijing, China, Mai 2004, S. 23 - 24.

DOI: 10.4028/www.scientific.net/msf.505-507.7

Google Scholar

[3] G. Jäger, E. Manske, T. Hausotte, R. Füßl, R. Grünwald, H. Büchner, W. Schott, D. Dontsov: Miniature interferometers developed for applications in nano-devices, Proceedings of the 7th International Conference on Mechatronic Technology, ICMT 2003 Taipei, Taiwan, December 2003, S. 41 - 45.

Google Scholar

[4] H. -J. Büchner; G. Jäger: Interferometrische Messverfahren zur berührungslosen und quasi punktförmigen Antastung von Messoberflächen; Technisches Messen, 59 (1992) 2, S. 43 - 47.

DOI: 10.1524/teme.1992.59.2.43

Google Scholar

[5] R. Mastylo; E. Manske; G. Jäger: Development of a focus sensor and its integration into the nanopositioning and nanomeasuring machine; OPTO 2004, 25. -27. 05. 2004; Nürnberg, Proceedings, S. 123 - 126.

DOI: 10.1524/teme.71.11.596.51377

Google Scholar