Thermopneumatic-Actuated Polydimethylsiloxane (PDMS) Microfluidic System

Jong Chul Yoo; C.J. Kang; D. Jeon; Yong Sang Kim

doi:10.4028/www.scientific.net/MSF.510-511.870

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HomeMaterials Science ForumMaterials Science Forum Vols. 510-511Thermopneumatic-Actuated Polydimethylsiloxane...

Thermopneumatic-Actuated Polydimethylsiloxane (PDMS) Microfluidic System

Abstract:

We propose a new PDMS microfluidic system including microvalves and a micropump that are easily integrated on the same substrate with the same process steps. The pumping rate of the fabricated microfluidic system was measured under various frequency and duty-ratio of applied power. The maximum pumping rate of about 26 nl/min is measured under the duty ratio of 1 % at 2 Hz of the applied pulse voltage. The dynamic response of the microvalve in the microfluidic system is measured under the on/off alternation with the applied power of 100 mW.

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Materials Science Forum (Volumes 510-511)

Pages:

870-873

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.510-511.870

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Online since:

March 2006

Authors:

Jong Chul Yoo, C.J. Kang, D. Jeon, Yong Sang Kim

Keywords:

Integration, Micro Pump, Microfluidic System, Microvalve, PDMS (Polydimethylsiloxane)

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References

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DOI: 10.1109/sensor.2003.1215272

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