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HomeMaterials Science ForumMaterials Science Forum Vols. 52-53Microbeam Analysis Studies of a-C:H Films

Microbeam Analysis Studies of a-C:H Films

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Properties and Characterization of Amorphous Carbon Films

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Periodical:

Materials Science Forum (Volumes 52-53)

Pages:

495-514

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.52-53.495

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Online since:

January 1990

Authors:

A.G. Fitzgerald, A.E. Henderson

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© 1990 Trans Tech Publications Ltd. All Rights Reserved

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