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HomeMaterials Science ForumMaterials Science Forum Vols. 52-53

Materials Science Forum Vols. 52-53

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.52-53

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Table of Contents

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Paper Title Page

Preface

Ion Beam and Ion-Assisted Deposition of Diamond-Like Carbon Films

Authors: S. Aisenberg, F.M. Kimock

1

Plasma Deposition, Properties and Structure of Amorphous Hydrogenated Carbon Films

Authors: P. Koidl, Ch. Wild, B. Dischler, J. Wagner, M. Ramsteiner

41

Structure and Physical Properties of Amorphous Hydrogenated Carbon (a-C:H) Films

Authors: H. Tsai

71

The Microstructure of Carbon Thin Films

Authors: D.C. Green, David R. McKenzie, P.B. Lukins

103

Electronic Structure and Bonding of a-C:H

Authors: J. Robertson

125

The Chemical Vapor Deposition of Diamond

Authors: W.A. Yarbrough, A. Inspektor, Russell F. Messier

151

Deposition of Amorphous Hydrogenated Carbon Films in Low and High Frequency Discharges

Authors: Y. Catherine

175

Preparation and Properties of High Density, Hydrogen Free Hard Carbon Films with Direct Ion Beam or Arc Discharge Deposition

Authors: J.-P. Hirvonen, J. Koskinen, R. Lappalainen, A. Anttila

197

Ion Beam Deposited Diamondlike Carbon Films

Authors: M.J. Mirtich

217

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