Paper Titles

Structure and Physical Properties of Amorphous Hydrogenated Carbon (a-C:H) Films
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The Microstructure of Carbon Thin Films
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Electronic Structure and Bonding of a-C:H
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The Chemical Vapor Deposition of Diamond
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Deposition of Amorphous Hydrogenated Carbon Films in Low and High Frequency Discharges
p.175

Preparation and Properties of High Density, Hydrogen Free Hard Carbon Films with Direct Ion Beam or Arc Discharge Deposition
p.197

Ion Beam Deposited Diamondlike Carbon Films
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Carbon (sp³) Film Growth from Mass Selected Ion Beams: Parametric Investigations and Subplantation Model
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Substrate Sputter Erosion Effects during a-C:H Film Formation in a Glow Discharge
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HomeMaterials Science ForumMaterials Science Forum Vols. 52-53Deposition of Amorphous Hydrogenated Carbon Films...

Deposition of Amorphous Hydrogenated Carbon Films in Low and High Frequency Discharges

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Properties and Characterization of Amorphous Carbon Films

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Periodical:

Materials Science Forum (Volumes 52-53)

Pages:

175-196

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.52-53.175

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Online since:

January 1990

Authors:

Y. Catherine

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© 1990 Trans Tech Publications Ltd. All Rights Reserved

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