Deposition of Amorphous Hydrogenated Carbon Films in Low and High Frequency Discharges

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Periodical:

Materials Science Forum (Volumes 52-53)

Edited by:

J. J. Pouch and S. A. Alterovitz

Pages:

175-196

DOI:

10.4028/www.scientific.net/MSF.52-53.175

Citation:

Y. Catherine "Deposition of Amorphous Hydrogenated Carbon Films in Low and High Frequency Discharges ", Materials Science Forum, Vols. 52-53, pp. 175-196, 1990

Online since:

January 1991

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