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HomeMaterials Science ForumMaterials Science Forum Vols. 54-55

Materials Science Forum Vols. 54-55

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.54-55

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Table of Contents

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Paper Title Page

Preface

Sputter Deposited Boron Nitride: A Review

Authors: Carolyn Rubin Aita

1

Thin Boron Nitride Films Obtained by Physical Vapour Deposition and by Ion Beam Assisted Techniques

Authors: L. Guzman, M. Elena

21

Coating Film Formation of Boron Nitride by Means of Dynamic Mixing Method

Authors: F. Fujimoto

45

Ion Assisted Synthesis of Boron Nitride Coatings

Authors: W.D. Halverson, T.G. Tetreault, J.K. Hirvonen

71

Preparation of Boron Nitride Thin Films by Chemical Vapor Deposition

Authors: K. Nakamura

111

Chemical Vapor Deposition of Turbostratic and Hexagonal Boron Nitride

Authors: K. Sugiyama, Hisayoshi Itoh

141

Growth of BN Thin Films by Pulsed Laser Evaporation

Authors: P.T. Murray

153

High Density Phases of BN

Authors: P.K. Lam, R.M. Wentzcovitch, M.L. Cohen

165

The Microstructure of Boron Nitride Thin Films

Authors: David R. McKenzie, W.G. Sainty, D. Green

193

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