Paper Titles

Sputter Deposited Boron Nitride: A Review
p.1

Thin Boron Nitride Films Obtained by Physical Vapour Deposition and by Ion Beam Assisted Techniques
p.21

Coating Film Formation of Boron Nitride by Means of Dynamic Mixing Method
p.45

Ion Assisted Synthesis of Boron Nitride Coatings
p.71

Preparation of Boron Nitride Thin Films by Chemical Vapor Deposition
p.111

Chemical Vapor Deposition of Turbostratic and Hexagonal Boron Nitride
p.141

Growth of BN Thin Films by Pulsed Laser Evaporation
p.153

High Density Phases of BN
p.165

The Microstructure of Boron Nitride Thin Films
p.193

HomeMaterials Science ForumMaterials Science Forum Vols. 54-55Preparation of Boron Nitride Thin Films by...

Preparation of Boron Nitride Thin Films by Chemical Vapor Deposition

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Synthesis and Properties of Boron Nitride

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Periodical:

Materials Science Forum (Volumes 54-55)

Pages:

111-140

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.54-55.111

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Online since:

January 1990

Authors:

K. Nakamura

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© 1990 Trans Tech Publications Ltd. All Rights Reserved

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