Preparation of Boron Nitride Thin Films by Chemical Vapor Deposition

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Periodical:

Materials Science Forum (Volumes 54-55)

Edited by:

J. J. Pouch and S. A. Alterovitz

Pages:

111-140

DOI:

10.4028/www.scientific.net/MSF.54-55.111

Citation:

K. Nakamura "Preparation of Boron Nitride Thin Films by Chemical Vapor Deposition", Materials Science Forum, Vols. 54-55, pp. 111-140, 1990

Online since:

January 1991

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$35.00

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