Thin Boron Nitride Films Obtained by Physical Vapour Deposition and by Ion Beam Assisted Techniques

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Periodical:

Materials Science Forum (Volumes 54-55)

Edited by:

J. J. Pouch and S. A. Alterovitz

Pages:

21-44

DOI:

10.4028/www.scientific.net/MSF.54-55.21

Citation:

L. Guzman and M. Elena, "Thin Boron Nitride Films Obtained by Physical Vapour Deposition and by Ion Beam Assisted Techniques", Materials Science Forum, Vols. 54-55, pp. 21-44, 1990

Online since:

January 1991

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