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Paper Titles
Preface
Sputter Deposited Boron Nitride: A Review
p.1
Thin Boron Nitride Films Obtained by Physical Vapour Deposition and by Ion Beam Assisted Techniques
p.21
Coating Film Formation of Boron Nitride by Means of Dynamic Mixing Method
p.45
Ion Assisted Synthesis of Boron Nitride Coatings
p.71
Preparation of Boron Nitride Thin Films by Chemical Vapor Deposition
p.111
Chemical Vapor Deposition of Turbostratic and Hexagonal Boron Nitride
p.141
Growth of BN Thin Films by Pulsed Laser Evaporation
p.153
High Density Phases of BN
p.165
HomeMaterials Science ForumMaterials Science Forum Vols. 54-55Sputter Deposited Boron Nitride: A Review

Sputter Deposited Boron Nitride: A Review

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Materials Science Forum (Volumes 54-55)

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1-20

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https://doi.org/10.4028/www.scientific.net/MSF.54-55.1

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January 1990

Authors:

Carolyn Rubin Aita

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© 1990 Trans Tech Publications Ltd. All Rights Reserved

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