Mono-sized silicon particles were effectively fabricated by a novel way named pulsated orifice ejection method (POEM). The particles are with very narrow particles size distribution and very small standard deviation of mean particle size. There are two different types spherical silicon particles were found. One consists of many grains mainly in random boundaries. The other consists of two or three grains with only twin orientation relationships, even single crystal in cross-section was also found within this type spherical silicon particles.