TiNi Shape Memory Alloys for MEMS: Thin Film Deposition, Thermophysical Properties and Laser Micromachining Characteristics

S.T. Davies

doi:10.4028/www.scientific.net/MSF.539-543.3151

Paper Titles

Manufacturing and Analysis of Mechanical Properties of Superalloy 718 in Hydraulic Forging
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Computer Simulation on Formation of Precision Forgings of Titanium Alloy and Superalloy
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Properties of Boron Fiber Reinforced Aluminum Matrix Composites Fabricated by Pulsed Current Hot Pressing (PCHP)
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Self-Healing of Creep Cavities by Boron Segregation and Boron Nitride Precipitation Autonomously Developed during High Temperature Use
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TiNi Shape Memory Alloys for MEMS: Thin Film Deposition, Thermophysical Properties and Laser Micromachining Characteristics
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Phase Transformation and Microstructures in Ni and Cu Base Ferromagnetic Shape Memory Alloys
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Effect of Aging on Microstructure and Martensitic Transformation in Ti-Zr-Ni Shape Memory Alloys
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HomeMaterials Science ForumMaterials Science Forum Vols. 539-543TiNi Shape Memory Alloys for MEMS: Thin Film...

TiNi Shape Memory Alloys for MEMS: Thin Film Deposition, Thermophysical Properties and Laser Micromachining Characteristics

Abstract:

The growth of TiNi thin films by ion beam sputter deposition using a Kaufmann type ion source is described. Argon ions are used to sputter separate Ti and Ni targets to deposit nearequiatomic TiNi thin films. Typically, ion energies and current densities of 1500 eV and 1 mA cm-2 respectively are used, with an argon overpressure of around 0.05 mtorr, to achieve deposition rates of order 1 μm hr-1. The thermophysical properties of the deposited films were investigated by thermal imaging. Patterning of TiNi films and foils with micrometre resolution using KrF excimer laser ablation at 248 nm wavelength, with beam fluence up to 2.5 J cm-2, 15 ns pulse duration and pulse rates up to 100 Hz has also been investigated.

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Materials Science Forum (Volumes 539-543)

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3151-3156

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https://doi.org/10.4028/www.scientific.net/MSF.539-543.3151

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March 2007

Authors:

S.T. Davies

Keywords:

Excimer Laser Ablation, Ion Beam Sputter Deposition, Shape Memory, TiNi Thin Film

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