Si film electrodes for Li micro-film batteries were fabricated on a Cu substrate and a Ci/Cu film. In the structural properties, FE-SEM observation demonstrated difference in surface morphologies of Si films with different under layers. Surface of the Si film deposited consists of clusters and average size of the cluster was 165 nm for Si/Cu film and 80 nm for Si/C/Cu film. Si film has amorphous phase in spite of different under layers; Cu substrate and C/Cu film. In the electrochemical properties, the carbon-inserted film showed a good cycleability compared with Si/Cu electrode. It is believed that the insertion of carbon film as a buffer film absorbed the stress generated during charge-discharge process and improved cycle performance of Si anode electrode.