Study on the Electrical Properties of Direct-Patternable SBT Films Formed by Photochemical Metal-Organic Deposition

Hyeong Ho Park; Hyung Ho Park; Ho Jung Chang; Hyeong Tag Jeon

doi:10.4028/www.scientific.net/MSF.544-545.1061

Paper Titles

Recovery of Nickel from Anode Materials of Spent Ni-MH Batteries and its Catalytic Property for CH₄ Dry Reforming
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Solvent Effect on Ion Hopping of Solid Polymer Electrolyte
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Strengthening of Water Glass Based Aerogel by TEOS
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Structural and Electrochemical Properties of a Si/C/Cu Film Anode Electrode
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Study on the Electrical Properties of Direct-Patternable SBT Films Formed by Photochemical Metal-Organic Deposition
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Synthesis and Characterization of Multi-Sulfonated Poly(Aryl Ether Ketone)s Proton Exchange Membranes
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Synthesis and Sintering of La_0.8Sr_0.2CrO₃ for the Separator of SOFC
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The Discharge Properties of Nickel Sulfide Thin Film Prepared from Sulfidation of Nickel Foil
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The Effects of Oxygen Partial Pressure on Interface States and Ferroelectric Properties of PZT/PbO/Si (MFIS) Structures
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Study on the Electrical Properties of Direct-Patternable SBT Films Formed by Photochemical Metal-Organic Deposition

Abstract:

The ferroelectric properties of UV irradiated and non-irradiated SBT thin films using photosensitive starting precursors were investigated. The observation of surface microstructure showed that UV irradiation and increase in anneal temperature induced the grain growth of SBT. The measured remnant polarization values of UV irradiated and non-irradiated SBT films after anneal at 700oC were 5.8 and 4.7 )C/cm2 and after anneal at 750oC, the values were 10.8 and 9.3 )C/cm2, respectively.