Study on the Precise Alignment of Micro-Lenses in the Microcolumn by Using the Laser Diffraction Pattern

Seung Joon Ahn; Dae Wook Kim; Ho Seob Kim; Chul Geun Park; Seung Joon Ahn

doi:10.4028/www.scientific.net/MSF.544-545.845

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HomeMaterials Science ForumMaterials Science Forum Vols. 544-545Study on the Precise Alignment of Micro-Lenses in...

Study on the Precise Alignment of Micro-Lenses in the Microcolumn by Using the Laser Diffraction Pattern

Abstract:

The alignment precision of the electron lenses is one of the most critical factors that determine overall performance of the microcolumn system including the image resolution and aberration. Since the lens apertures are usually as small as 5 ~ 300 μm, the alignment is difficult to carry out, even if the expensive and complicated aligner is used. In this work, we have developed a novel alignment method using laser diffraction pattern, with which we can easily obtain high-precision alignment. The images of Cu grid (mesh# 1000) and carbon nanotubes (200-nm diameter) taken by the microcolumn fabricated by the new alignment scheme has confirmed that the new method was very simple and useful.

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Periodical:

Materials Science Forum (Volumes 544-545)

Pages:

845-848

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.544-545.845

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Online since:

May 2007

Authors:

Seung Joon Ahn, Dae Wook Kim, Ho Seob Kim, Chul Geun Park, Seung Joon Ahn

Keywords:

He-Ne Laser, Laser Diffraction, Microcolumn, Optical Lithography, Precise Alignment

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