Visible-Blind Metal-Semiconductor-Metal Structured Deep-Ultraviolet Photodetectors Using Single-Crystalline Diamond Thin Film

Mei Yong Liao; Yasuo Koide

doi:10.4028/www.scientific.net/MSF.546-549.1759

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HomeMaterials Science ForumMaterials Science Forum Vols. 546-549Visible-Blind Metal-Semiconductor-Metal Structured...

Visible-Blind Metal-Semiconductor-Metal Structured Deep-Ultraviolet Photodetectors Using Single-Crystalline Diamond Thin Film

Abstract:

Metal-semiconductor-metal (MSM) planar photodiodes and photoconductors were fabricated on unintentionally doped homoepitaxial diamond thin films deposited on Ib and IIa-type diamond substrated. The MSM photoconductor on the epilayer grown on the Ib-type substrate exhibits the highest discrimination ratio up to 108 between 210 nm and visible light and a photocurrent gain around 33 at 220 nm. The persistent photoconductivity is rather week for such kind of photoconductor.

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Periodical:

Materials Science Forum (Volumes 546-549)

Pages:

1759-1762

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.546-549.1759

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Online since:

May 2007

Authors:

Mei Yong Liao, Yasuo Koide

Keywords:

MSM, Photodetector (PD), Single-Crystalline Diamond, Visible-Blind

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