The Influence of the Substrate on the Mechanical Properties of Si-Doped DLC Thin Films

Abstract:

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In this work, Si-doped DLC films were deposited on stainless steel (316SS) and polycarbonate (PC) substrates by RF-PACVD in gas mixtures of SiH4+CH4, with 2, 5 and 10 vol.% SiH4. The increase of the Si content in the films led to a progressive drop in the hardness from 30 GPa down to 23 GPa whereas the elastic modulus increased from 124 GPa up to 146 GPa, as measured in the SS coated substrates. In the case of coated PC samples pop-in was observed in the loading curve which was interpreted by finite element simulation and nanoscratching techniques.

Info:

Periodical:

Materials Science Forum (Volumes 587-588)

Edited by:

António Torres Marques, António Fernando Silva, António Paulo Monteiro Baptista, Carlos Sá, Fernando Jorge Lino Alves, Luís Filipe Malheiros and Manuel Vieira

Pages:

839-843

DOI:

10.4028/www.scientific.net/MSF.587-588.839

Citation:

C. W. Moura e Silva et al., "The Influence of the Substrate on the Mechanical Properties of Si-Doped DLC Thin Films", Materials Science Forum, Vols. 587-588, pp. 839-843, 2008

Online since:

June 2008

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$35.00

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