Challenges in Integration of Piezoelectric Ceramics in Micro Electromechanical Systems

Abstract:

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Lead zirconate titanate (PZT) thick films, a few tens of micrometres thick, are of technological interest for integration with microsystems to create micro electromechanical systems (MEMS) with high sensitivity and power output. This paper examines the challenges faced in integrating thick film PZT with other materials to create functional micro devices. Thermal, chemical and mechanical challenges associated with integration will be examined and potential solutions explored.

Info:

Periodical:

Edited by:

Ping Xiao and Brian Ralph

Pages:

43-50

DOI:

10.4028/www.scientific.net/MSF.606.43

Citation:

R.A. Dorey "Challenges in Integration of Piezoelectric Ceramics in Micro Electromechanical Systems", Materials Science Forum, Vol. 606, pp. 43-50, 2009

Online since:

October 2008

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$35.00

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