Challenges in Integration of Piezoelectric Ceramics in Micro Electromechanical Systems

R.A. Dorey

doi:10.4028/www.scientific.net/MSF.606.43

Paper Titles

Preface

Thermal Barrier Coatings on Nickel Superalloy Substrates
p.1

Silicon Nitride Ceramics
p.27

Challenges in Integration of Piezoelectric Ceramics in Micro Electromechanical Systems
p.43

When Should Microwaves Be Used to Process Technical Ceramics?
p.51

Ceramic and Glass Matrix Composites Containing Carbon Nanotubes
p.61

Stresses in Multilayered Ceramics Subjected to Biaxial Flexure Tests
p.79

Advanced Nano-Scale Metrology for the Characterization of Ceramic Materials in the Scanning Electron Microscope
p.93

Finite Element Calculation of Sintering Deformation Using Limited Experimental Data
p.103

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Challenges in Integration of Piezoelectric Ceramics in Micro Electromechanical Systems

Abstract:

Lead zirconate titanate (PZT) thick films, a few tens of micrometres thick, are of technological interest for integration with microsystems to create micro electromechanical systems (MEMS) with high sensitivity and power output. This paper examines the challenges faced in integrating thick film PZT with other materials to create functional micro devices. Thermal, chemical and mechanical challenges associated with integration will be examined and potential solutions explored.