Mechanical properties of micro-electro-mechanical systems (MEMS) materials are increasingly important with the wide use of miniaturized systems. This paper deals with development of the strain measurement module for micro materials tests. Vision strain method (VSM) and actuating stroke method (ASM) are adopted in the strain measurement module in order to reduce the discrepancies between the measured deformation and actual one in the specimen. With the developed strain measurement system, a number of tensile tests were concluded for 99.9% nickel thin films with the thickness of 500µm. Specimens with various widths from 1 mm to 2mm and with various lengths from 2mm to 4mm were used in the tests. From the experiment, material properties such as yield strength, tensile strength, fracture strength, fracture strain and young’s modulus are analyzed with stress-strain curves of 99.9% nickel thin film.