Large Surface Area of HMDS Plasma Polymerized Thin Film Used for Production of Miniaturized Structures

Abstract:

The aim of this work was the production of a large surface area of hexamethyldisilazane (HMDS) plasma-deposited thin films and their applicability in a miniaturized structure useful for preliminary analysis of organic mixtures. The HMDS plasma films were produced with different surface areas and morphologies, and all films adsorbed polar and non-polar organic compounds. A low cost miniaturized structure was manufactured in glass using a Milling cutter and covered with HMDS plasma films. Good agreement was observed between simulation and experimental results on those microstructures. The observed different performance between pure and mixtures of organic compound samples suggests that the proposed system is a simple setup that could be useful for rough analysis of a fuel.

• Periodical: Materials Science Forum (Volumes 636-637)
• Pages: 1065-1072
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.636-637.1065
• Online since: January 2010
• Authors: Lilian Marques Silva, Roberto R. Lima, E.R. Fachini, E.W. Simões, E. Pecoraro, Maria Lucia Pereira Silva
• Keywords: HexaMethylDisilane, Miniaturized Structure, Plasma Polymerization, Volatile Organic Compound (VOC)

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DOI: 10.1016/s0040-6090(97)00650-0