Micropore and nanotube formation on the Ti oxide are important to improve the cell adhesion and proliferation in clinical use. In this study, nanotube and micropore of Ti alloy for biocompatibility have been investigated using FE-SEM and XRD. Ternary alloys were prepared by using high purity sponge Ti Ta, Zr and Nb sphere (99.95% wt.%). Two-step anodizing was used for surface modification of the titanium alloys. Micropore formation was first performed using a potentiostat in 1 M H3PO4 electrolyte and nanotube formation was performed in 1M H3PO4 + 0.8wt% NaF solution by using a potentiostat. The two-step anodizing process is an efficient method for forming micropores and nanotubes on the surfaces of ternary titanium alloys, and the morphology of micropore and nanotube is dependent on the alloying element and composition of ternary alloy.