Piezoelectric Micromachined Ultrasonic Transducer with a Dome-Shaped Single Layer Structure

Abstract:

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Piezoelectric micromachined ultrasonic transducers (pMUTs) have been investigated as a promising new approach for ultrasound generation and reception. Most of the reported pMUTs employs a unimorph structure of a micromachined piezoelectric thin film on a silicon membrane. In this paper, a dome-shaped model for piezoelectric micromachined ultrasonic transducer (pMUT) was proposed to replace the conventional unimorph structure. A finite element analysis was carried out to study the elecro-mechanical behaviour of the dome-shaped model. The result showed that a considerable improvement of electro-mechanical coupling performance was achieved with the new model.

Info:

Periodical:

Materials Science Forum (Volumes 675-677)

Edited by:

Yi Tan and Dongying Ju

Pages:

1131-1134

DOI:

10.4028/www.scientific.net/MSF.675-677.1131

Citation:

J. Peng et al., "Piezoelectric Micromachined Ultrasonic Transducer with a Dome-Shaped Single Layer Structure", Materials Science Forum, Vols. 675-677, pp. 1131-1134, 2011

Online since:

February 2011

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Price:

$35.00

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