Piezoelectric Micromachined Ultrasonic Transducer with a Dome-Shaped Single Layer Structure

Jue Peng; Chen Chao; Hu Tang

doi:10.4028/www.scientific.net/MSF.675-677.1131

Paper Titles

Determination of Refractive Indices and Linear Coefficients of Thermal Expansion for Development of Athermal Glass
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Investigation on Post Treatment of Nano-Size Silver Conductive Film
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Microstructure and Wear Properties of TiC/7075 Composites by In Situ Reaction Liquidus Curve Casting Method
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Preparation of Al-Sc Alloy by LiF-ScF₃-ScCl₃ Molten Salt Electrolysis
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Piezoelectric Micromachined Ultrasonic Transducer with a Dome-Shaped Single Layer Structure
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Quantitatively Characterizing Damages on Steel Beams by Using PZT Impedance Method
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A Modified Electro-Mechanical Impedance Model for Dynamic Analysis of PZT Sensor Coupled with Beam Structure
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Phase Analyses of a TtPt Alloy Synthesized by Spark Plasma Sintering
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An Experimental Investigation of Mechanical Strength of Knotted NiTi SMA Fiber Composite
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HomeMaterials Science ForumMaterials Science Forum Vols. 675-677Piezoelectric Micromachined Ultrasonic Transducer...

Piezoelectric Micromachined Ultrasonic Transducer with a Dome-Shaped Single Layer Structure

Abstract:

Piezoelectric micromachined ultrasonic transducers (pMUTs) have been investigated as a promising new approach for ultrasound generation and reception. Most of the reported pMUTs employs a unimorph structure of a micromachined piezoelectric thin film on a silicon membrane. In this paper, a dome-shaped model for piezoelectric micromachined ultrasonic transducer (pMUT) was proposed to replace the conventional unimorph structure. A finite element analysis was carried out to study the elecro-mechanical behaviour of the dome-shaped model. The result showed that a considerable improvement of electro-mechanical coupling performance was achieved with the new model.

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Periodical:

Materials Science Forum (Volumes 675-677)

Pages:

1131-1134

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.675-677.1131

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Online since:

February 2011

Authors:

Jue Peng, Chen Chao, Hu Tang

Keywords:

Dome-Shaped, Micromachined Ultrasonic Transducer, Piezoelectric Single Crystal

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