Effect of Deposition Temperature on the Structure and Mechanical Properties of Ti-6Al-4V Film

Abstract:

Ti-6Al-4V films were deposited by direct-current magnetron sputtering at different substrate temperatures. The structure and the surface morphology of the films were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The hardness and elastic moduli of Ti-6Al-4V films were measured by nanoindentation test. The results showed that the phase direction of the films deposited at room temperature was (102) orientation, and turned to almost complete (002) preferred orientation at 300°C. For a higher temperature of 500°C, the preferred orientation of the film disappeared and presented a random grain orientation. The hardness and elastic moduli of Ti-6Al-4V films obviously showed the dependence on the temperature. The relationships among temperature, microstructure and mechanical properties of Ti-6Al-4V films were discussed in this paper.

• Periodical: Materials Science Forum (Volume 749)
• Pages: 643-647
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.749.643
• Online since: March 2013
• Authors: Lei Li, Ya Feng Lu, Wen Xue Li, Li Ying Zeng, Yi Yang, Zhi Min Hou, Dong Han
• Keywords: Crystallographic Orientation, Mechanical Property, Microstructure, Ti-6Al-4V Films

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