Solid Phase Growth of some Metal and Metal Oxide Thin Films on Sapphire and Quartz Glass Substrates

Abstract:

Solid phase growth of thin films of copper (Cu), aluminum (Al) and zinc oxide (ZnO) on single crystalline sapphire and quartz glass substrates were tried by heat-treatments and their crystallization conditions were investigated. ZnO thin films relatively easily recrystallized even when they were deposited on the amorphous quartz glass substrate. On the other hand, Cu and Al thin films hardly recrystallized when they were deposited on the quartz glass substrate. The metal thin films could be recrystallized at only extremely narrow windows of the heat-treatment conditions when they were deposited on the single crystalline sapphire substrate. The window of the solid phase heteroepitaxial growth condition of the Al film was wider than that of the Cu film.

• Periodical: Materials Science Forum (Volume 753)
• Pages: 505-509
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.753.505
• Online since: March 2013
• Authors: Yuichi Sato, Toshifumi Suzuki, Hiroyuki Mogami, Fumito Otake, Hirotoshi Hatori, Suguru Igarashi
• Keywords: Aluminum (Al), Copper, Glass, Sapphire, Solid Phase Growth, Thin Film, Zinc Oxide (ZnO)

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