XRD Characterization of Sputtered Mo and W Thin Films

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Periodical:

Materials Science Forum (Volumes 79-82)

Edited by:

R. Delhez and E.J. Mittemeijer

Pages:

647-652

Citation:

J.L.C. Daams et al., "XRD Characterization of Sputtered Mo and W Thin Films", Materials Science Forum, Vols. 79-82, pp. 647-652, 1991

Online since:

January 1991

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