Diffusivities of 3D Transition-Metal Impurities in Silicon

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Periodical:

Materials Science Forum (Volumes 83-87)

Edited by:

Gordon Davies, G.G. DeLeo and M. Stavola

Pages:

227-232

DOI:

10.4028/www.scientific.net/MSF.83-87.227

Citation:

H. Nakashima and K. Hashimoto, "Diffusivities of 3D Transition-Metal Impurities in Silicon", Materials Science Forum, Vols. 83-87, pp. 227-232, 1992

Online since:

January 1992

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Price:

$35.00

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