The Analyse of Nanocomposite Thin Coatings Using Specimens Prepared by Focused Ion Beam Milling

Abstract:

The microstructure of physical vapour deposition (PVD) coatings deposited by duplex technology was investigated by Dual Beam FIB/SEM system (focused ion beam / scanning electron microscope), which allows one to examine cross sections of specimens from their surface down to the substrate. Examined were PVD coatings of nanocomposite type: duplex AlXN3 (X=Cr) and duplex nACRo3, deposited by LARC and CERC technologies. Duplex coating is a modern technology, which combines plasma nitriding and PVD coating in one cycle. The FIB analysis can be widely used in the field of study of basic materials and technological applications as it is based on highly focused ion beam which enables accurate machining of the investigated specimens and flexible processing at a micro/nanometric level. Cross sections of specimens obtained by FIB-SEMs document the arrangement of individual deposited nanomultilayers within the nanocomposite coatings and their EDS analysis in specific locations.

• Periodical: Materials Science Forum (Volume 891)
• Pages: 579-585
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.891.579
• Online since: March 2017
• Authors: Dagmar Jakubéczyová*, Beáta Ballóková
• Keywords: Duplex Coating, EDS, FIB, Layer, Nanocomposite, Scanning Electron Microscopy (SEM)

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