Correlation between Grain Growth and Hillock Growth in Thin Thermally Annealed Al-1%Si Films on Silicon Substrates

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Periodical:

Materials Science Forum (Volumes 94-96)

Edited by:

G. Abbruzzese and P. Brozzo

Pages:

557-562

Citation:

D. Gerth et al., "Correlation between Grain Growth and Hillock Growth in Thin Thermally Annealed Al-1%Si Films on Silicon Substrates ", Materials Science Forum, Vols. 94-96, pp. 557-562, 1992

Online since:

January 1992

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