Determination of Grain-Orientation-Dependent Stress in Coatings

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Abstract:

Quantitative interpretations of the so-called non-linear lattice strain distributions observed in coatings and thin films are important not only for determining the macro- and microstress fields, but also for inferring the active mechanisms of grain interactions during various deposition processes. In this paper, we present a method, which determines simultaneously both the macro- and micro- stress fields in the coatings and thin films. This method is extended from the previous stress-orientation distribution function (SODF) analysis method, which has already been used for residual stress analysis in bulk materials subjected to rolling and fatigue deformation. The validity of analysis method is demonstrated through measurements of lattice strains by high-energy x-ray and analysis of grain-orientation-dependent stresses in a CrN coating.

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Solid State Phenomena (Volume 105)

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107-112

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July 2005

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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