Texture Analysis of CVD Free-Standing Diamond Films

Leng Chen; H.P. Feng; Fan Xiu Lu

doi:10.4028/www.scientific.net/SSP.105.421

Paper Titles

Texture Transition in Ag-Pd Alloy Substrate for Superconducting Tapes
p.397

Micro-Diffraction Studies of the Evolution of Textures in CVD-Grown Diamond Films
p.403

Temperature Dependence of the Texture of Sm-Co Thin Films
p.409

Aluminum Matrix Texture and Particle Characterization in Al-Al₃Ti FGMs Produced by a Centrifugal Solid-Particle Method
p.415

Texture Analysis of CVD Free-Standing Diamond Films
p.421

Texture Measurements of Hydroxyapatite Crystallites at Bone-Implant Interfaces in Sheep Tibia
p.427

Growth Mechanism of Biaxially Aligned Magnesium Oxide Deposited by Unbalanced Magnetron Sputtering
p.433

Texture Analysis of Poly(vinyl Chloride) Foils
p.439

Biaxially Aligned Yttria Stabilized Zirconia and Titanium Nitride Layers Deposited by Unbalanced Magnetron Sputtering
p.447

HomeSolid State PhenomenaSolid State Phenomena Vol. 105Texture Analysis of CVD Free-Standing Diamond...

Texture Analysis of CVD Free-Standing Diamond Films

Abstract:

The crystallographic textures of the free-standing diamond films which were synthesized by the chemical vapor deposition (CVD) using a CH4/H2/Ar gas mixtures have been investigated. Texture components of the diamond films are analyzed with pole figures and orientation distribution function (ODF). The surface morphology of the diamond films grown at different substrate temperatures as well as different gas concentrations is observed with scanning electron microscopy (SEM). The experimental results indicate that the intensity of {110} fibre texture becomes much higher with the increase of the substrate temperature. It is considered that the higher multiplicity of <110> crystallographic direction in diamond octahedron leads to the higher appearance possibility of {110} fibre texture and the final texture components of the diamond films depend upon the CVD deposition parameters.