Parametric Sensitivity of MEMS-Gyro

Saulius Kaušinis; Rimantas Barauskas

doi:10.4028/www.scientific.net/SSP.113.495

Paper Titles

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Conditions of Result Approach while Using Airfoil's Measurement Data for Calculation of Wing's Lifting Force
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Parametric Sensitivity of MEMS-Gyro
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Research of the Durability of a Covering from Oxide Ceramics
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Cavitation Erosion Behavior of 18/8 Stainless Steel after Its Laser Alloying of Manganese
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HomeSolid State PhenomenaSolid State Phenomena Vol. 113Parametric Sensitivity of MEMS-Gyro

Parametric Sensitivity of MEMS-Gyro

Abstract:

The paper presents the finite element (FE) modeling approach to sensitivity analysis of MEMS-based gyros. The FE model is employed to both studying the system’s dynamical properties and appreciation of the sensitivity of these to various influencing effects. The sensitivity functions have been obtained for adjusting the geometric parameters of the piezoelectric transducers in order to achieve the desired values of natural frequencies. Results are presented in terms of sensor performance characteristics for various design parameters and modes of operation. The modeling assumptions adopted are tested experimentally on a cantilever-shape test vehicle.

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Periodical:

Solid State Phenomena (Volume 113)

Pages:

495-499

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.113.495

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Online since:

June 2006

Authors:

Saulius Kaušinis, Rimantas Barauskas

Keywords:

MEMS Sensors, Modeling, Sensitivity

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References

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