High Pressure on Asperity Surface Caused by Nano Particles’ Behavior in Non-Newtonian Slurries

Abstract:

Particle’s behavior in the slurry with power-law viscosity shows great effect on the wafer surface polishing. Hydrodynamic pressure is periodically generated on the surface asperity when particles are passing through it. Fatigue fracture occurs under the effect of periodical pressure and it begins from the top to the bottom of the asperity. Based on the energy-balance fracture theory, the removal rate is calculated and it shows good agreement with experiment data.

• Periodical: Solid State Phenomena (Volumes 121-123)
• Pages: 1143-1148
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.121-123.1143
• Online since: March 2007
• Authors: H.S. Chen, Da Rong Chen, Jiang Li
• Keywords: Chemical Mechanical Polishing (CMP), Nanoparticle, Non-Newtonian Fluid, Rheology

References

[1] J. Larsen-Basse, H. Liang. Wear. Vol 233-235(1999),: pp.647-654.

[2] H. Lei, J. Luo. Wear, Vol. 257(2004), pp.461-470.

[3] Y. Zhao, L. Chang. Wear, Vol. 252(2002), pp.220-226.

[4] S. Sundararajan, D. G. Thakurta. Journal of the electrochemical society. Vol. 146 (1999), pp.761-766.

[5] S. M. Allameh, P. Shrotriya. J. of microelectro mechanical systems. Vol. 3(2003), pp.313-323.

[6] J.S. Zhao, Fracture mechanics and fracture physics (Huazhong Keji Press, China 2003).